Accelerometers

"An accelerometer is a tool that measures proper acceleration.[1] Proper acceleration is the acceleration (the rate of change of velocity) of a body in its own instantaneous rest frame" -- https://en.wikipedia.org/wiki/Accelerometer

There seems to be research on SiC 400C - 600C accelerometers. 'Fabrication of SiC/Si Hybrid Accelerometer for High Temperature Applications", https://www.semanticscholar.org/paper/Fabrication-of-SiC%2FSi-Hybrid-Accelerometer-for-High-Chand/25f5fcbf668102155f08ac246a45fd9d2586cd54

Also some GaN work. "Inertial sensing technologies in high temperature environments over 500°C are in great demand in aerospace, power plants and material processing applications." "GaN based MEMS accelerometer for high temperature application", https://ui.adsabs.harvard.edu/abs/2018APS..MART60359A/abstract